JPH01147410U - - Google Patents
Info
- Publication number
- JPH01147410U JPH01147410U JP4262588U JP4262588U JPH01147410U JP H01147410 U JPH01147410 U JP H01147410U JP 4262588 U JP4262588 U JP 4262588U JP 4262588 U JP4262588 U JP 4262588U JP H01147410 U JPH01147410 U JP H01147410U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- sensor
- variable valve
- gas
- circular pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4262588U JPH01147410U (fr) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4262588U JPH01147410U (fr) | 1988-03-30 | 1988-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01147410U true JPH01147410U (fr) | 1989-10-12 |
Family
ID=31269034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4262588U Pending JPH01147410U (fr) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01147410U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10275018A (ja) * | 1997-03-31 | 1998-10-13 | Hitachi Metals Ltd | マスフローコントローラ |
-
1988
- 1988-03-30 JP JP4262588U patent/JPH01147410U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10275018A (ja) * | 1997-03-31 | 1998-10-13 | Hitachi Metals Ltd | マスフローコントローラ |