JPH01147265U - - Google Patents
Info
- Publication number
- JPH01147265U JPH01147265U JP4146588U JP4146588U JPH01147265U JP H01147265 U JPH01147265 U JP H01147265U JP 4146588 U JP4146588 U JP 4146588U JP 4146588 U JP4146588 U JP 4146588U JP H01147265 U JPH01147265 U JP H01147265U
- Authority
- JP
- Japan
- Prior art keywords
- plating
- substrate
- view
- semiconductor substrate
- potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4146588U JPH01147265U (ko) | 1988-03-28 | 1988-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4146588U JPH01147265U (ko) | 1988-03-28 | 1988-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01147265U true JPH01147265U (ko) | 1989-10-11 |
Family
ID=31267898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4146588U Pending JPH01147265U (ko) | 1988-03-28 | 1988-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01147265U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101523397B1 (ko) * | 2007-05-21 | 2015-05-27 | 램 리써치 코포레이션 | 통합된 전기적 콘택트를 갖는 기판 그리퍼 |
-
1988
- 1988-03-28 JP JP4146588U patent/JPH01147265U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101523397B1 (ko) * | 2007-05-21 | 2015-05-27 | 램 리써치 코포레이션 | 통합된 전기적 콘택트를 갖는 기판 그리퍼 |