JPH01146526U - - Google Patents
Info
- Publication number
- JPH01146526U JPH01146526U JP4426488U JP4426488U JPH01146526U JP H01146526 U JPH01146526 U JP H01146526U JP 4426488 U JP4426488 U JP 4426488U JP 4426488 U JP4426488 U JP 4426488U JP H01146526 U JPH01146526 U JP H01146526U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- mound
- foreign matter
- semiconductor wafer
- cutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4426488U JPH01146526U (ro) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4426488U JPH01146526U (ro) | 1988-03-31 | 1988-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01146526U true JPH01146526U (ro) | 1989-10-09 |
Family
ID=31270632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4426488U Pending JPH01146526U (ro) | 1988-03-31 | 1988-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01146526U (ro) |
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1988
- 1988-03-31 JP JP4426488U patent/JPH01146526U/ja active Pending