JPH01146521U - - Google Patents
Info
- Publication number
- JPH01146521U JPH01146521U JP4318388U JP4318388U JPH01146521U JP H01146521 U JPH01146521 U JP H01146521U JP 4318388 U JP4318388 U JP 4318388U JP 4318388 U JP4318388 U JP 4318388U JP H01146521 U JPH01146521 U JP H01146521U
- Authority
- JP
- Japan
- Prior art keywords
- clean
- clean gas
- clean room
- air flow
- flow adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4318388U JPH01146521U (en, 2012) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4318388U JPH01146521U (en, 2012) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146521U true JPH01146521U (en, 2012) | 1989-10-09 |
Family
ID=31269588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4318388U Pending JPH01146521U (en, 2012) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146521U (en, 2012) |
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1988
- 1988-03-31 JP JP4318388U patent/JPH01146521U/ja active Pending