JPH01146141U - - Google Patents

Description

[Brief explanation of the drawing]

Fig. 1 is a schematic front view of a clean box according to the first embodiment of the present invention, Fig. 2 is a schematic plan view of the clean box shown in Fig. 1, and Fig. 3 is an enlarged portion of the clean box shown in Fig. 1. FIG. 4 is an enlarged schematic diagram of a portion of the clean box in FIG. 1. FIG. 5 is a schematic plan view of a clean box according to a second embodiment of the present invention, and FIG. 6 is a sectional view of the clean box shown in FIG. 1...Clean box, 2...Evaluation environment room,
3...Object to be measured, 6...Dust removal filter,
7... Filter, 8... Pallet, 9... Guide plate (guide member), 11... Pure water sprinkler pipe (pure water supply device), 17... Air pump (air supply device).

Claims (1)

[Scope of utility model registration request] Create an evaluation environment chamber surrounded by walls surrounding the object to be measured, and a dust removal filter to create a flow of air directed downward from the ceiling of the evaluation environment chamber and exhausted to the outside through a filter at the bottom. an air supply device, a pure water supply device that flows pure water all around the upper part of the wall of the evaluation environment chamber, a pallet installed below the evaluation environment chamber and filled with pure water, and a wall of the evaluation environment chamber. 1. A clean box comprising: a guide member extending from the container, the lower end opening facing above the pallet, and collecting the pure water flowing on the wall surface of the evaluation environment chamber onto the pallet.