JPH01145127U - - Google Patents

Info

Publication number
JPH01145127U
JPH01145127U JP4263188U JP4263188U JPH01145127U JP H01145127 U JPH01145127 U JP H01145127U JP 4263188 U JP4263188 U JP 4263188U JP 4263188 U JP4263188 U JP 4263188U JP H01145127 U JPH01145127 U JP H01145127U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
container
over time
carrier
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4263188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4263188U priority Critical patent/JPH01145127U/ja
Publication of JPH01145127U publication Critical patent/JPH01145127U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP4263188U 1988-03-29 1988-03-29 Pending JPH01145127U (US07541385-20090602-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4263188U JPH01145127U (US07541385-20090602-C00001.png) 1988-03-29 1988-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4263188U JPH01145127U (US07541385-20090602-C00001.png) 1988-03-29 1988-03-29

Publications (1)

Publication Number Publication Date
JPH01145127U true JPH01145127U (US07541385-20090602-C00001.png) 1989-10-05

Family

ID=31269040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4263188U Pending JPH01145127U (US07541385-20090602-C00001.png) 1988-03-29 1988-03-29

Country Status (1)

Country Link
JP (1) JPH01145127U (US07541385-20090602-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100521314B1 (ko) * 1997-10-13 2005-12-30 삼성전자주식회사 반도체장치제조용웨이퍼이송기구

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100521314B1 (ko) * 1997-10-13 2005-12-30 삼성전자주식회사 반도체장치제조용웨이퍼이송기구

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