JPH01143672A - Ultrasonic vibrator - Google Patents
Ultrasonic vibratorInfo
- Publication number
- JPH01143672A JPH01143672A JP29979987A JP29979987A JPH01143672A JP H01143672 A JPH01143672 A JP H01143672A JP 29979987 A JP29979987 A JP 29979987A JP 29979987 A JP29979987 A JP 29979987A JP H01143672 A JPH01143672 A JP H01143672A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic transducer
- electrode plate
- metal block
- electrostrictive
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 239000009719 polyimide resin Substances 0.000 claims description 4
- 239000004962 Polyamide-imide Substances 0.000 claims description 2
- 239000004693 Polybenzimidazole Substances 0.000 claims description 2
- 239000000805 composite resin Substances 0.000 claims description 2
- 239000005011 phenolic resin Substances 0.000 claims description 2
- 229920002312 polyamide-imide Polymers 0.000 claims description 2
- 229920002480 polybenzimidazole Polymers 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 7
- 238000006243 chemical reaction Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000008602 contraction Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、振動変換効率に優れた超音波振動子に関する
もので競る。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ultrasonic transducer with excellent vibration conversion efficiency.
〔従来技術）
従来、超音波振動子の１つとしてボルト締めランジュバ
ン型振動子がよく知られており、超音波手術用具等の医
療用機器に多く使用されている。[Prior Art] Conventionally, a bolted Langevin type transducer is well known as one type of ultrasonic transducer, and is often used in medical equipment such as ultrasonic surgical tools.
より１個多い数の環状の電極板（３１）及びその両端に
配設された２個の金属ブロック（３２）より構成されて
おり、電歪素子（３０）及び電極板（３１）の中心穴に
ボルトを通して、金属ブロック（３２）のねじ孔とボル
トにより全体を締着、固定させている。また、電極板（
３１）と金属ブロック（３２）の間に絶縁体を配しても
良く、安全性の面からも好ましい。各電極板へ導線（３
３）、（３４）より所定の周波数の高周波電流を流すこ
とで、超音波振動子は端面（３５）に超音波振動を発生
する。It is composed of one more annular electrode plate (31) and two metal blocks (32) arranged at both ends of the annular electrode plate (31), and the center hole of the electrostrictive element (30) and the electrode plate (31). A bolt is passed through the metal block (32), and the whole is tightened and fixed by the screw hole of the metal block (32) and the bolt. In addition, the electrode plate (
An insulator may be placed between the metal block (31) and the metal block (32), which is preferable from the viewpoint of safety. Lead wires (3
3) and (34), the ultrasonic vibrator generates ultrasonic vibrations at the end face (35) by passing a high frequency current of a predetermined frequency.
しかしながら、電歪素子（３０）、電極板（３１）及び
金属ブロック（３２）相互の隣接する各表面における表
面粗さ及び平面度の加工バラツキによって、電歪素子（
３０）の電歪効果により生ずる０、５〜１０μｍの伸び
縮みを振動子端面（３５）に生ずる振動に変換する効率
がバラツキを生じ易く、また使用と共に低下し易い問題
がおったＪざらにまた、ボルトによる締着のため、強固
に締着した場合、各電歪素子（３０）、電極板（３１）
及び金属ブロック（３２）相互の各圧接面には、大きな
りｒＪ肴力の分布が中心穴より外周に向かって放射状に
生じ、中心穴周辺部で生じた伸縮と外周に近い部分で生
じた伸縮とが異り、効率よく振動子端面（３５）におけ
る振動に変換できないという欠点があり、一方、弱く締
着すると各電歪素子や電極板の位置がずれてきて発熱し
、振動不可能となる恐れがあり、締着力の設定が難しか
った。これらの振動変換効率と比例するパラメーターと
して動アドミツタンス値がある。However, due to processing variations in the surface roughness and flatness of the adjacent surfaces of the electrostrictive element (30), the electrode plate (31), and the metal block (32),
There was also a problem that the efficiency of converting the 0.5 to 10 μm expansion and contraction caused by the electrostrictive effect of 30) into vibrations generated at the end face of the vibrator (35) tended to vary and easily deteriorated with use. , each electrostrictive element (30), electrode plate (31) when firmly fastened because it is fastened with bolts.
And on each pressure contact surface of the metal block (32), a large rJ force distribution occurs radially from the center hole toward the outer periphery, and the expansion and contraction that occurs around the center hole and the expansion and contraction that occurs near the outer periphery. Unlike the above, it has the disadvantage that it cannot be efficiently converted into vibration at the vibrator end face (35), and on the other hand, if it is weakly tightened, the positions of each electrostrictive element and electrode plate will shift and generate heat, making it impossible to vibrate. This made it difficult to set the tightening force. A dynamic admittance value is a parameter proportional to these vibration conversion efficiencies.
従来の超音波振動子では、低電圧、例えば共振周波数の
１〜ＩＯＶ程度の電圧を、直径１０〜３０ｍφ、４〜１
０枚の電歪素子を有した振動子に印加した場合、動アド
ミツタンス値は通常５〜１０ｍ５で、５０〜５００Ｖ程
度の実用レベルの電圧を加えて振動させた場合には、振
動子より異常発熱を生じたり、又は、共振状態を維持で
きずに振動が停止することがあり、これらの解決策とし
て、締着力を個々の振動子ごとに調整するという余分な
時間を貸していた。In conventional ultrasonic transducers, a low voltage, for example, a voltage of about 1 to IOV of the resonant frequency, is applied to a transducer with a diameter of 10 to 30 mφ, 4 to 1
When applied to a vibrator with 0 electrostrictive elements, the dynamic admittance value is usually 5 to 10 m5, and when a practical level voltage of about 50 to 500 V is applied and vibrated, the vibrator generates abnormal heat. Or, the resonance state may not be maintained and the vibration may stop. As a solution to these problems, extra time has been taken to adjust the clamping force for each vibrator.
本発明は、従来の超音波振動子の振動変換効率が低く、
締着力の調整が難しいという問題を解決し、ボルト締め
による締着力を、振動子を構成する各素子相互の圧接面
全体に均一に加えることによって振動変換効率を向上さ
せ、締着力の調整工数を省き製造上の作業性に優れた超
音波振動子を提供することを目的としたものである。The present invention has low vibration conversion efficiency of conventional ultrasonic transducers,
This solves the problem of difficulty in adjusting the clamping force, and by uniformly applying the clamping force from bolt tightening to the entire pressure contact surface of each element that makes up the vibrator, it improves vibration conversion efficiency and reduces the number of man-hours required for adjusting the clamping force. The object of the present invention is to provide an ultrasonic transducer that can be omitted and has excellent manufacturing workability.
即ち本発明は、１個もしくは複数個の環状の電歪素子と
、該電歪素子より１個多い数の環状の電極板とを交互に
重ねて電気的に並列に接続し、その両端にそれぞれ絶縁
体を介し、もしくは介せずして金属ブロックを配設し、
中心穴にボルト・を通して全体を締結したボルト締めラ
ンジュバン型超音波振動子におりて、電極板、電歪素子
、金属ブロックおよび絶縁体から選ばれた２つが相互に
隣接する各圧接面間に硬弾性体層を設けたことを特徴と
する超音波振動子である。That is, in the present invention, one or more annular electrostrictive elements and one more annular electrode plates than the electrostrictive elements are alternately stacked and electrically connected in parallel, and each A metal block is arranged with or without an insulator,
A bolt-fastened Langevin-type ultrasonic transducer is assembled by passing a bolt through the center hole and fastening the whole thing together, and two selected from the electrode plate, electrostrictive element, metal block, and insulator are placed between each adjacent press-contact surface. This is an ultrasonic transducer characterized by being provided with an elastic layer.
以下図面を参照して、本発明の詳細な説明する。The present invention will be described in detail below with reference to the drawings.
第１図は、本発明の１実施例となる超音波振動子を示し
た図である。本発明の超音波振動子は、環状の電歪素子
（１）と電歪素子より１個多い数の環状の電極板（２）
を交互に重ね、さらにその両端に金属ブロック（３）を
配設した基本構成より成り、電歪素子（１）、電極板（
２）、金属ブロック（３）の相互に隣接する各圧接面の
間には硬弾性体層（４）を設け、電歪素子（１）及び電
極板（２）の中心穴にボルトを通して、金属ブロック（
３）のねじ孔とボルトによって全体を締着、固定させて
いる。また、第２図に示したように、電極板（２）と金
属ブロック（３）の間に硬弾性体層（４）を介して絶縁
体（８）を配しても良く、超音波手術用具等の医療用機
器に使用する場合には、安全性の面からも好ましい。FIG. 1 is a diagram showing an ultrasonic transducer according to an embodiment of the present invention. The ultrasonic vibrator of the present invention includes an annular electrostrictive element (1) and an annular electrode plate (2) whose number is one more than the electrostrictive element.
It consists of a basic configuration in which metal blocks (3) are arranged alternately on top of each other and metal blocks (3) are placed on both ends of the metal blocks (3).
2) A hard elastic layer (4) is provided between the mutually adjacent press-contact surfaces of the metal block (3), and a bolt is passed through the center hole of the electrostrictive element (1) and the electrode plate (2). block(
3) The whole is tightened and fixed using the screw holes and bolts. Furthermore, as shown in Fig. 2, an insulator (8) may be placed between the electrode plate (2) and the metal block (3) with a hard elastic layer (4) interposed therebetween. When used in medical equipment such as tools, it is preferable from the viewpoint of safety.
各電極板は、第１図のように導線（５） 、（６）によ
って電気的に並ｒ！ＩＪに接続されており、所定の周波
数の高周波電流を流すことによって電歪素子（１）に電
歪効果を生じ、それが伝達、変換されて超音波振動子の
端面（旬に超音波振動を発生する。Each electrode plate is electrically paralleled by conducting wires (5) and (6) as shown in FIG. It is connected to the IJ, and by passing a high-frequency current of a predetermined frequency, an electrostrictive effect is produced in the electrostrictive element (1), which is transmitted and converted to the end face of the ultrasonic vibrator (which produces ultrasonic vibrations) Occur.
電歪素子（１）の材質は締着圧力に耐えれるものであれ
ば特に限定されるものではないが、ＰＺＴ（チタン酸ジ
ルコン酸鉛）等のセラミックスを用いるのが好ましい。The material of the electrostrictive element (1) is not particularly limited as long as it can withstand the clamping pressure, but it is preferable to use ceramics such as PZT (lead zirconate titanate).
金属ブロック（３）の材質は、ステンレス鋼、チタン合
金、アルミニウム合金等格
が使用でき、また異種の轡質による金属ブロックの組合
せもてき、特に限定はされない。又、絶縁体（８）とし
ては、電気抵抗が１０１３Ωｃｍ以上で比誘電率が２０
以下のセラミックス、例えばＡｌ１性を有するものであ
れば限定はされない。The material of the metal block (3) is not particularly limited, and stainless steel, titanium alloy, and aluminum alloy can be used, and metal blocks of different materials can be combined. In addition, the insulator (8) has an electrical resistance of 1013 Ωcm or more and a relative dielectric constant of 20.
The following ceramics are not limited as long as they have Al1 properties, for example.
本発明における硬弾性体層（４）は、超音波振動子の組
立てのためのボルト締めによる圧締力に耐える硬さ（剛
性）と、その両側に来る電歪素子（１）、電極板（２）
、金属ブロック（３ｇ）等を構成する金属やセラミック
の界面粗さと平面度の加工バラツキを吸収し、超音波振
動を圧接面全体に均等に伝達できる弾性とを兼ね備えて
いることが要求される。弾性率が小さすぎる場合は超音
波振動を吸収するように作用して、超音波振動の伝達の
効率が低くなるため、金属やセラミックに比べて１／１
０〜１／１００程度のオーダーの弾性率を有するものが
適切である。また、超音波振動子の正常作動時（３０〜
４０’Ｃ）だけでなく、異常時の温度（７０〜８０ ’
Ｃ）でも剛性や弾性率が大きく低下しないことが必要で
ある。さらに、超音波手術用具等の医療用機器に使用さ
れる場合は、その滅菌方法として最近ではオートクレー
ブ処理（１１０°Ｃ以上の蒸気滅菌）可能なことが要求
されるようになってきていることから、少なくとも１１
０〜１３５℃程度の高温においても、ボルト締めによる
圧締力にたえる剛性を失わないことが必要である。その
ような材質としては、エポキシ系樹脂、ポリイミド系樹
脂、ポリアミドイミド系樹脂、ポリベンズイミダゾール
系樹脂、ざらには、エポキシ系樹脂とポリイミド系樹脂
またはフェノール系樹脂の複合型樹脂等の架橋硬化タイ
プの樹脂が適している。硬弾性体層（４）の厚みは５〜
２００μｍ、好ましくは２０〜１００μｍとするのが適
切で、５μ尻より薄くなると弾性体としての効果が得ら
れず、一方、２００μｍを超えると弾性体としての作用
が強くなり、超音波振動の伝達効率が低下する傾向が出
てくる。The hard elastic layer (4) in the present invention has hardness (rigidity) that can withstand the clamping force of bolt tightening for assembling the ultrasonic transducer, and the electrostrictive elements (1) and electrode plates ( 2)
It is required to have elasticity that can absorb processing variations in the interface roughness and flatness of metals and ceramics constituting the metal block (3g), etc., and that can evenly transmit ultrasonic vibrations to the entire pressure contact surface. If the elastic modulus is too small, it acts to absorb ultrasonic vibrations and the efficiency of ultrasonic vibration transmission becomes low, so the elasticity is 1/1 that of metals and ceramics.
A material having an elastic modulus on the order of 0 to 1/100 is suitable. Also, during normal operation of the ultrasonic transducer (30~
40'C) as well as abnormal temperatures (70~80'C)
Even in C), it is necessary that the rigidity and elastic modulus do not decrease significantly. Furthermore, when used in medical equipment such as ultrasonic surgical tools, it has recently become necessary to be able to autoclave (steam sterilize at 110°C or higher) as a sterilization method. , at least 11
Even at high temperatures of about 0 to 135°C, it is necessary to maintain the rigidity to withstand the clamping force of bolt tightening. Examples of such materials include epoxy resins, polyimide resins, polyamideimide resins, polybenzimidazole resins, and cross-linked and hardened resins such as composite resins of epoxy resins and polyimide resins or phenolic resins. resin is suitable. The thickness of the hard elastic layer (4) is 5~
A suitable thickness is 200 μm, preferably 20 to 100 μm; if it is thinner than 5 μm, it will not be effective as an elastic body, while if it exceeds 200 μm, the effect as an elastic body will become stronger, and the transmission efficiency of ultrasonic vibration will decrease. There is a tendency to decrease.
本発明の構造により、動アドミツタンス値が従来の２倍
以上の２０〜５０ｍ５を示し、また、超音波振動子の使
用による劣化（動アドミツタンス値の低下）も小さくな
る。例えば第３図は本発明による超音波振動子と従来の
超音波振動子の一定の実用レベルの振動を発生させた後
の、動アドミツタンス値の変化を示している。縦軸は動
アドミツタンス値を、横軸は振動時間を示し、振動子は
電歪素子の枚数を６枚とした構造のものであり、振動条
件は振動子に同じ振動体（ホーン）を接続し、振動体先
端に液体負荷を加え振動子印加電圧を１００〜３００Ｖ
にして、１０秒間振動、１０秒間停止のサイクル盆繰返
し行なった結果、本発明による振動子の動アドミツタン
ス値は、はぼ２０ｍ５以上と初期値の２３ｍ５に対して
変化はないが、これに対し従来の振動子は、初期値も１
０ｍ５と低く、振動時間が増えるに従って、動アドミツ
タンス値は下る傾向を示した他、実用レベルでの振動で
は異常発熱や負荷の変動による振動停止が生じモ←た。The structure of the present invention exhibits a dynamic admittance value of 20 to 50 m5, which is more than twice that of the conventional one, and also reduces deterioration (decrease in dynamic admittance value) due to the use of an ultrasonic transducer. For example, FIG. 3 shows changes in dynamic admittance values of an ultrasonic transducer according to the present invention and a conventional ultrasonic transducer after a certain practical level of vibration is generated. The vertical axis shows the dynamic admittance value, and the horizontal axis shows the vibration time.The vibrator has a structure with six electrostrictive elements, and the vibration conditions are as follows: The same vibrating body (horn) is connected to the vibrator. , apply a liquid load to the tip of the vibrator and increase the voltage applied to the vibrator to 100 to 300 V.
As a result of repeating the cycle of vibrating for 10 seconds and stopping for 10 seconds, the dynamic admittance value of the vibrator according to the present invention was approximately 20 m5 or more, which was unchanged from the initial value of 23 m5. The initial value of the oscillator is also 1
The dynamic admittance value was as low as 0 m5, and as the vibration time increased, the dynamic admittance value showed a tendency to decrease, and vibrations at a practical level caused abnormal heat generation and vibration stoppage due to load fluctuations.
本発明に従うと、振動子を構成する各素子相互の圧接面
の締着圧力が均一となり、圧接面全面の電歪効果による
伸縮を超音波振動子の振動に変換できるため、低電圧時
の動アドミツタンス値で２０ｍ５以上の高い砧が得られ
、振動変換効率が向上し、個々の振動子に対する締着力
調整の工数が省けて製造コストの低減ができ、また、硬
弾性体層により直径方向に生ずる微小な振動を吸収し、
必要とされる超音波振動子の端面で軸方向の振動のみを
取り出せる。更に、各構成部品の圧接面の平行度、表面
粗さの製造のバラツキも硬弾性体層の厚みによって吸収
できるため、コストダウン、歩留りの向上ができ、超音
波手術用具等の医療用機器に使用される超音波振動子と
して好適である。According to the present invention, the clamping pressure of the pressure contact surfaces of each element constituting the vibrator becomes uniform, and the expansion and contraction due to the electrostrictive effect of the entire pressure contact surface can be converted into vibration of the ultrasonic vibrator. A high tension with an admittance value of 20 m5 or more can be obtained, the vibration conversion efficiency is improved, the man-hours of adjusting the clamping force for each vibrator can be saved, and manufacturing costs can be reduced. Absorbs minute vibrations,
Only the vibration in the axial direction can be extracted from the required end face of the ultrasonic transducer. Furthermore, manufacturing variations in the parallelism and surface roughness of the press-contact surfaces of each component can be absorbed by the thickness of the hard elastic layer, reducing costs and improving yields, making it suitable for use in medical equipment such as ultrasonic surgical tools. It is suitable for use as an ultrasonic transducer.
第１図及び第２図は本発明の一実施例となる超音波振動
子の構成を示す図で、第３図は超音波振動子の振動時間
による動アドミツタンス値の変化を示した図である。ま
た、第４図は従来の超音波振動子の構成の一例を示した
図である。
特許出願人 住友ベークライト株式会社第１ｒｌｉ
第２図Fig. 1 and Fig. 2 are diagrams showing the configuration of an ultrasonic transducer according to an embodiment of the present invention, and Fig. 3 is a diagram showing changes in dynamic admittance value depending on vibration time of the ultrasonic transducer. . Further, FIG. 4 is a diagram showing an example of the configuration of a conventional ultrasonic transducer. Patent applicant: Sumitomo Bakelite Co., Ltd. No. 1 rli Fig. 2
Claims (3)
素子より１個多い数の環状の電極板とを交互に重ねて電
気的に並列に接続し、その両端にそれぞれ絶縁体を介し
、もしくは介せずして金属ブロックを配設し、中心穴に
ボルトを通して全体を締結したボルト締めランジュバン
型超音波振動子において、電極板、電歪素子、金属ブロ
ックおよび絶縁体から選ばれた２つが相互に隣接する各
圧接面間に硬弾性体層を設けたことを特徴とする超音波
振動子。(1) One or more annular electrostrictive elements and one more annular electrode plate than the electrostrictive elements are stacked alternately and electrically connected in parallel, and an insulator is attached to each end of the annular electrode plate. In a bolted Langevin type ultrasonic transducer, in which a metal block is arranged with or without a metal block, and the whole is fastened by passing a bolt through the center hole, a metal block selected from an electrode plate, an electrostrictive element, a metal block, and an insulator is used. An ultrasonic transducer characterized in that a hard elastic layer is provided between each of the two adjacent pressure contact surfaces.
脂、ポリアミドイミド系樹脂、ポリベンズイミダゾール
系樹脂、およびエポキシ系樹脂とポリイミド系樹脂もし
くはフェノール系樹脂との複合型樹脂からなる群から選
ばれた１種であることを特徴とする、特許請求の範囲第
１項記載の超音波振動子。(2) The hard elastic layer is selected from the group consisting of epoxy resin, polyimide resin, polyamideimide resin, polybenzimidazole resin, and composite resin of epoxy resin and polyimide resin or phenol resin. The ultrasonic transducer according to claim 1, characterized in that the ultrasonic transducer is one type of ultrasonic transducer.
有するセラミックであることを特徴とする、特許請求の
範囲第１項又は第２項記載の超音波振動子。(3) The ultrasonic transducer according to claim 1 or 2, wherein the insulator is a ceramic having an electrical resistance of 10^1^3 Ωcm or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29979987A JPH01143672A (en) | 1987-11-30 | 1987-11-30 | Ultrasonic vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29979987A JPH01143672A (en) | 1987-11-30 | 1987-11-30 | Ultrasonic vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143672A true JPH01143672A (en) | 1989-06-06 |
Family
ID=17877074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29979987A Pending JPH01143672A (en) | 1987-11-30 | 1987-11-30 | Ultrasonic vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143672A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2388741A (en) * | 2002-05-17 | 2003-11-19 | Morgan Crucible Co | Ultrasonic piezoelectric transducer with coated electrodes |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51113586A (en) * | 1975-03-31 | 1976-10-06 | Hitachi Ltd | Landupan-type vibrator |
| JPS5855759U (en) * | 1981-10-13 | 1983-04-15 | 旭化成株式会社 | cleaning cloth |
-
1987
- 1987-11-30 JP JP29979987A patent/JPH01143672A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51113586A (en) * | 1975-03-31 | 1976-10-06 | Hitachi Ltd | Landupan-type vibrator |
| JPS5855759U (en) * | 1981-10-13 | 1983-04-15 | 旭化成株式会社 | cleaning cloth |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2388741A (en) * | 2002-05-17 | 2003-11-19 | Morgan Crucible Co | Ultrasonic piezoelectric transducer with coated electrodes |
| GB2388741B (en) * | 2002-05-17 | 2004-06-30 | Morgan Crucible Co | Transducer assembly |
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