JPH01143496U - - Google Patents
Info
- Publication number
- JPH01143496U JPH01143496U JP4054388U JP4054388U JPH01143496U JP H01143496 U JPH01143496 U JP H01143496U JP 4054388 U JP4054388 U JP 4054388U JP 4054388 U JP4054388 U JP 4054388U JP H01143496 U JPH01143496 U JP H01143496U
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- support
- substrate
- supporting substrate
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 230000002452 interceptive effect Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4054388U JPH01143496U (cs) | 1988-03-28 | 1988-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4054388U JPH01143496U (cs) | 1988-03-28 | 1988-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143496U true JPH01143496U (cs) | 1989-10-02 |
Family
ID=31267011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4054388U Pending JPH01143496U (cs) | 1988-03-28 | 1988-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143496U (cs) |
-
1988
- 1988-03-28 JP JP4054388U patent/JPH01143496U/ja active Pending
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