JPH01143121U - - Google Patents

Info

Publication number

JPH01143121U

JPH01143121U JP3850288U JP3850288U JPH01143121U JP H01143121 U JPH01143121 U JP H01143121U JP 3850288 U JP3850288 U JP 3850288U JP 3850288 U JP3850288 U JP 3850288U JP H01143121 U JPH01143121 U JP H01143121U

Authority

JP

Japan

Prior art keywords

resist

semiconductor substrate

coating device

pattern

depending

Prior art date

1988-03-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000011248 coating agent Substances 0.000 claims description 4
• 238000000576 coating method Methods 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims description 2
• 238000000034 method Methods 0.000 claims 1
• 238000004528 spin coating Methods 0.000 claims 1