JPH01143064U - - Google Patents

Info

Publication number
JPH01143064U
JPH01143064U JP3982388U JP3982388U JPH01143064U JP H01143064 U JPH01143064 U JP H01143064U JP 3982388 U JP3982388 U JP 3982388U JP 3982388 U JP3982388 U JP 3982388U JP H01143064 U JPH01143064 U JP H01143064U
Authority
JP
Japan
Prior art keywords
presser
plate
disk
fixing
straight line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3982388U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3982388U priority Critical patent/JPH01143064U/ja
Publication of JPH01143064U publication Critical patent/JPH01143064U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案に係る実施例の要部の平面図、
第２図は同じくその側断面図、第３図は従来例の
要部の平面図、第４図は同じくその側断面図であ
る。 符号説明、１：円盤、２：ゴム板、３：ウエハ
、４，５：押さえ具、６，７：支軸、８：ばね支
持台、９：ばね。

Claims (1)

    【実用新案登録請求の範囲】
  1. 中心軸線のまわりに回転する円盤の面上に配置
    された板状部材が、その位置と前記円盤の中心と
    を通る直線上の、前記板状部材の内側、外側の各
    対向箇所で押さえ具によつて着脱可能に押圧固定
    される装置において、前記円盤面と平行で前記直
    線と直角な軸線のまわりに回転可能であり、所定
    付勢力が前記押圧固定の向きに作用する前記押さ
    え具を備え、この押さえ具には前記円盤回転時の
    遠心力が前記押圧固定の向きに作用するようにし
    たことを特徴とする板状部材の固定装置。
JP3982388U 1988-03-25 1988-03-25 Pending JPH01143064U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3982388U JPH01143064U (ja) 1988-03-25 1988-03-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3982388U JPH01143064U (ja) 1988-03-25 1988-03-25

Publications (1)

Publication Number Publication Date
JPH01143064U true JPH01143064U (ja) 1989-09-29

Family

ID=31266312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3982388U Pending JPH01143064U (ja) 1988-03-25 1988-03-25

Country Status (1)

Country Link
JP (1) JPH01143064U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002164318A (ja) * 2000-11-27 2002-06-07 Ishii Hyoki Corp 基板スピン装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002164318A (ja) * 2000-11-27 2002-06-07 Ishii Hyoki Corp 基板スピン装置

Similar Documents

Publication Publication Date Title
JPH01143064U (ja)
JPS6218851U (ja)
JPS6196601U (ja)
JPH0376246U (ja)
JPS61193559U (ja)
JPS6311752U (ja)
JPH0211546U (ja)
JPH0345244U (ja)
JPS6316647U (ja)
JPH0328547U (ja)
JPS61156048U (ja)
JPH0416650U (ja)
JPS63155118U (ja)
JPS591548U (ja) 倣い研磨用砥石装置
JPS622811U (ja)
JPS6152352U (ja)
JPS6263865U (ja)
JPS6161650U (ja)
JPS60194768U (ja) デイスクの回転駆動装置
JPH0175371U (ja)
JPS6349644U (ja)
JPS6456059U (ja)
JPH02110018U (ja)
JPS618880U (ja) レ−ダ指示機の目盛円板回転機構
JPS63153343U (ja)