JPH01143062U - - Google Patents

Info

Publication number
JPH01143062U
JPH01143062U JP3952988U JP3952988U JPH01143062U JP H01143062 U JPH01143062 U JP H01143062U JP 3952988 U JP3952988 U JP 3952988U JP 3952988 U JP3952988 U JP 3952988U JP H01143062 U JPH01143062 U JP H01143062U
Authority
JP
Japan
Prior art keywords
micro
positioning mechanism
piezoelectric element
detection probe
element body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3952988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3952988U priority Critical patent/JPH01143062U/ja
Publication of JPH01143062U publication Critical patent/JPH01143062U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP3952988U 1988-03-25 1988-03-25 Pending JPH01143062U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3952988U JPH01143062U (enrdf_load_stackoverflow) 1988-03-25 1988-03-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3952988U JPH01143062U (enrdf_load_stackoverflow) 1988-03-25 1988-03-25

Publications (1)

Publication Number Publication Date
JPH01143062U true JPH01143062U (enrdf_load_stackoverflow) 1989-09-29

Family

ID=31266029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3952988U Pending JPH01143062U (enrdf_load_stackoverflow) 1988-03-25 1988-03-25

Country Status (1)

Country Link
JP (1) JPH01143062U (enrdf_load_stackoverflow)

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