JPH01143056U - - Google Patents
Info
- Publication number
- JPH01143056U JPH01143056U JP3945988U JP3945988U JPH01143056U JP H01143056 U JPH01143056 U JP H01143056U JP 3945988 U JP3945988 U JP 3945988U JP 3945988 U JP3945988 U JP 3945988U JP H01143056 U JPH01143056 U JP H01143056U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- type ion
- arc chamber
- utility
- bias electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3945988U JPH01143056U (OSRAM) | 1988-03-25 | 1988-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3945988U JPH01143056U (OSRAM) | 1988-03-25 | 1988-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143056U true JPH01143056U (OSRAM) | 1989-09-29 |
Family
ID=31265962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3945988U Pending JPH01143056U (OSRAM) | 1988-03-25 | 1988-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143056U (OSRAM) |
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1988
- 1988-03-25 JP JP3945988U patent/JPH01143056U/ja active Pending