JPH01142594U - - Google Patents
Info
- Publication number
- JPH01142594U JPH01142594U JP3768088U JP3768088U JPH01142594U JP H01142594 U JPH01142594 U JP H01142594U JP 3768088 U JP3768088 U JP 3768088U JP 3768088 U JP3768088 U JP 3768088U JP H01142594 U JPH01142594 U JP H01142594U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- compression pump
- stationary
- housing
- thrust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims 9
- 238000007906 compression Methods 0.000 claims 9
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988037680U JP2546174Y2 (ja) | 1988-03-24 | 1988-03-24 | 複合真空ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988037680U JP2546174Y2 (ja) | 1988-03-24 | 1988-03-24 | 複合真空ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01142594U true JPH01142594U (US06168776-20010102-C00041.png) | 1989-09-29 |
| JP2546174Y2 JP2546174Y2 (ja) | 1997-08-27 |
Family
ID=31264257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988037680U Expired - Lifetime JP2546174Y2 (ja) | 1988-03-24 | 1988-03-24 | 複合真空ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2546174Y2 (US06168776-20010102-C00041.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2108844A2 (en) | 2008-03-26 | 2009-10-14 | Ebara Corporation | Turbo vacuum pump |
| JP2009235923A (ja) * | 2008-03-26 | 2009-10-15 | Ebara Corp | ターボ型真空ポンプ |
| JP2009257212A (ja) * | 2008-04-17 | 2009-11-05 | Ebara Corp | ターボ型真空ポンプ |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5730998A (en) * | 1980-06-25 | 1982-02-19 | Westinghouse Electric Corp | Method of fixing nuclear waste |
| JPS60204997A (ja) * | 1984-03-28 | 1985-10-16 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
| JPS61185696A (ja) * | 1985-02-13 | 1986-08-19 | Hitachi Ltd | 分子ポンプ |
| JPS6229796A (ja) * | 1985-07-31 | 1987-02-07 | Hitachi Ltd | 真空ポンプ |
| JPH01167495A (ja) * | 1987-12-23 | 1989-07-03 | Hitachi Ltd | 真空ポンプ |
| JPH0219694A (ja) * | 1988-07-08 | 1990-01-23 | Ebara Res Co Ltd | オイルフリー型真空ポンプ |
-
1988
- 1988-03-24 JP JP1988037680U patent/JP2546174Y2/ja not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5730998A (en) * | 1980-06-25 | 1982-02-19 | Westinghouse Electric Corp | Method of fixing nuclear waste |
| JPS60204997A (ja) * | 1984-03-28 | 1985-10-16 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
| JPS61185696A (ja) * | 1985-02-13 | 1986-08-19 | Hitachi Ltd | 分子ポンプ |
| JPS6229796A (ja) * | 1985-07-31 | 1987-02-07 | Hitachi Ltd | 真空ポンプ |
| JPH01167495A (ja) * | 1987-12-23 | 1989-07-03 | Hitachi Ltd | 真空ポンプ |
| JPH0219694A (ja) * | 1988-07-08 | 1990-01-23 | Ebara Res Co Ltd | オイルフリー型真空ポンプ |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2108844A2 (en) | 2008-03-26 | 2009-10-14 | Ebara Corporation | Turbo vacuum pump |
| JP2009235923A (ja) * | 2008-03-26 | 2009-10-15 | Ebara Corp | ターボ型真空ポンプ |
| US8109744B2 (en) | 2008-03-26 | 2012-02-07 | Ebara Corporation | Turbo vacuum pump |
| JP2009257212A (ja) * | 2008-04-17 | 2009-11-05 | Ebara Corp | ターボ型真空ポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2546174Y2 (ja) | 1997-08-27 |
