JPH01142463U - - Google Patents

Info

Publication number
JPH01142463U
JPH01142463U JP3820788U JP3820788U JPH01142463U JP H01142463 U JPH01142463 U JP H01142463U JP 3820788 U JP3820788 U JP 3820788U JP 3820788 U JP3820788 U JP 3820788U JP H01142463 U JPH01142463 U JP H01142463U
Authority
JP
Japan
Prior art keywords
quartz crucible
divided
chamfered
support device
divided surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3820788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519339Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3820788U priority Critical patent/JPH0519339Y2/ja
Publication of JPH01142463U publication Critical patent/JPH01142463U/ja
Application granted granted Critical
Publication of JPH0519339Y2 publication Critical patent/JPH0519339Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP3820788U 1988-03-22 1988-03-22 Expired - Lifetime JPH0519339Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3820788U JPH0519339Y2 (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3820788U JPH0519339Y2 (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Publications (2)

Publication Number Publication Date
JPH01142463U true JPH01142463U (enrdf_load_stackoverflow) 1989-09-29
JPH0519339Y2 JPH0519339Y2 (enrdf_load_stackoverflow) 1993-05-21

Family

ID=31264770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3820788U Expired - Lifetime JPH0519339Y2 (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Country Status (1)

Country Link
JP (1) JPH0519339Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012066969A (ja) * 2010-09-24 2012-04-05 Heraeus Shin-Etsu America Inc るつぼとサスセプタとの間のガスを排気するための方法及び装置
WO2019064697A1 (ja) * 2017-09-29 2019-04-04 株式会社Sumco 坩堝支持台座、石英坩堝支持装置およびシリコン単結晶の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012066969A (ja) * 2010-09-24 2012-04-05 Heraeus Shin-Etsu America Inc るつぼとサスセプタとの間のガスを排気するための方法及び装置
WO2019064697A1 (ja) * 2017-09-29 2019-04-04 株式会社Sumco 坩堝支持台座、石英坩堝支持装置およびシリコン単結晶の製造方法
US11598019B2 (en) 2017-09-29 2023-03-07 Sumco Corporation Crucible-supporting pedestal, quartz crucible-supporting device, and method for producing silicon single crystal

Also Published As

Publication number Publication date
JPH0519339Y2 (enrdf_load_stackoverflow) 1993-05-21

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