JPH01142463U - - Google Patents
Info
- Publication number
- JPH01142463U JPH01142463U JP3820788U JP3820788U JPH01142463U JP H01142463 U JPH01142463 U JP H01142463U JP 3820788 U JP3820788 U JP 3820788U JP 3820788 U JP3820788 U JP 3820788U JP H01142463 U JPH01142463 U JP H01142463U
- Authority
- JP
- Japan
- Prior art keywords
- quartz crucible
- divided
- chamfered
- support device
- divided surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3820788U JPH0519339Y2 (cs) | 1988-03-22 | 1988-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3820788U JPH0519339Y2 (cs) | 1988-03-22 | 1988-03-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01142463U true JPH01142463U (cs) | 1989-09-29 |
| JPH0519339Y2 JPH0519339Y2 (cs) | 1993-05-21 |
Family
ID=31264770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3820788U Expired - Lifetime JPH0519339Y2 (cs) | 1988-03-22 | 1988-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519339Y2 (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012066969A (ja) * | 2010-09-24 | 2012-04-05 | Heraeus Shin-Etsu America Inc | るつぼとサスセプタとの間のガスを排気するための方法及び装置 |
| WO2019064697A1 (ja) * | 2017-09-29 | 2019-04-04 | 株式会社Sumco | 坩堝支持台座、石英坩堝支持装置およびシリコン単結晶の製造方法 |
-
1988
- 1988-03-22 JP JP3820788U patent/JPH0519339Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012066969A (ja) * | 2010-09-24 | 2012-04-05 | Heraeus Shin-Etsu America Inc | るつぼとサスセプタとの間のガスを排気するための方法及び装置 |
| WO2019064697A1 (ja) * | 2017-09-29 | 2019-04-04 | 株式会社Sumco | 坩堝支持台座、石英坩堝支持装置およびシリコン単結晶の製造方法 |
| US11598019B2 (en) | 2017-09-29 | 2023-03-07 | Sumco Corporation | Crucible-supporting pedestal, quartz crucible-supporting device, and method for producing silicon single crystal |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519339Y2 (cs) | 1993-05-21 |