JPH01142452U - - Google Patents

Info

Publication number
JPH01142452U
JPH01142452U JP3595088U JP3595088U JPH01142452U JP H01142452 U JPH01142452 U JP H01142452U JP 3595088 U JP3595088 U JP 3595088U JP 3595088 U JP3595088 U JP 3595088U JP H01142452 U JPH01142452 U JP H01142452U
Authority
JP
Japan
Prior art keywords
motor
wafer
central axis
vacuum
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3595088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3595088U priority Critical patent/JPH01142452U/ja
Publication of JPH01142452U publication Critical patent/JPH01142452U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3595088U 1988-03-17 1988-03-17 Pending JPH01142452U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3595088U JPH01142452U (US07922777-20110412-C00004.png) 1988-03-17 1988-03-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3595088U JPH01142452U (US07922777-20110412-C00004.png) 1988-03-17 1988-03-17

Publications (1)

Publication Number Publication Date
JPH01142452U true JPH01142452U (US07922777-20110412-C00004.png) 1989-09-29

Family

ID=31262576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3595088U Pending JPH01142452U (US07922777-20110412-C00004.png) 1988-03-17 1988-03-17

Country Status (1)

Country Link
JP (1) JPH01142452U (US07922777-20110412-C00004.png)

Similar Documents

Publication Publication Date Title
JPH01142452U (US07922777-20110412-C00004.png)
JPH0217553U (US07922777-20110412-C00004.png)
JPS62115140U (US07922777-20110412-C00004.png)
JPH01143349U (US07922777-20110412-C00004.png)
JPS6295867U (US07922777-20110412-C00004.png)
JPH0359366U (US07922777-20110412-C00004.png)
JPH0260860U (US07922777-20110412-C00004.png)
JPS6230336U (US07922777-20110412-C00004.png)
JPH0378507U (US07922777-20110412-C00004.png)
JPS63195567U (US07922777-20110412-C00004.png)
JPH01103014U (US07922777-20110412-C00004.png)
JPH045362U (US07922777-20110412-C00004.png)
JPH0424054U (US07922777-20110412-C00004.png)
JPS60138634U (ja) 球体研削装置
JPH01129826U (US07922777-20110412-C00004.png)
JPS6378063U (US07922777-20110412-C00004.png)
JPH0448258U (US07922777-20110412-C00004.png)
JPS63136808U (US07922777-20110412-C00004.png)
JPS6446136U (US07922777-20110412-C00004.png)
JPS6229245U (US07922777-20110412-C00004.png)
JPS6232746U (US07922777-20110412-C00004.png)
JPS61163207U (US07922777-20110412-C00004.png)
JPH0247105U (US07922777-20110412-C00004.png)
JPS63110365U (US07922777-20110412-C00004.png)
JPS62159232U (US07922777-20110412-C00004.png)