JPH01142451U - - Google Patents

Info

Publication number
JPH01142451U
JPH01142451U JP3525688U JP3525688U JPH01142451U JP H01142451 U JPH01142451 U JP H01142451U JP 3525688 U JP3525688 U JP 3525688U JP 3525688 U JP3525688 U JP 3525688U JP H01142451 U JPH01142451 U JP H01142451U
Authority
JP
Japan
Prior art keywords
shutter
shutter plate
deforms
airtight
electric signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3525688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3525688U priority Critical patent/JPH01142451U/ja
Publication of JPH01142451U publication Critical patent/JPH01142451U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3525688U 1988-03-18 1988-03-18 Pending JPH01142451U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3525688U JPH01142451U (en, 2012) 1988-03-18 1988-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3525688U JPH01142451U (en, 2012) 1988-03-18 1988-03-18

Publications (1)

Publication Number Publication Date
JPH01142451U true JPH01142451U (en, 2012) 1989-09-29

Family

ID=31261907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3525688U Pending JPH01142451U (en, 2012) 1988-03-18 1988-03-18

Country Status (1)

Country Link
JP (1) JPH01142451U (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013090103A (ja) * 2011-10-17 2013-05-13 Seiko Epson Corp シャッター装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013090103A (ja) * 2011-10-17 2013-05-13 Seiko Epson Corp シャッター装置

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