JPH01141996U - - Google Patents
Info
- Publication number
- JPH01141996U JPH01141996U JP3717788U JP3717788U JPH01141996U JP H01141996 U JPH01141996 U JP H01141996U JP 3717788 U JP3717788 U JP 3717788U JP 3717788 U JP3717788 U JP 3717788U JP H01141996 U JPH01141996 U JP H01141996U
- Authority
- JP
- Japan
- Prior art keywords
- joint
- quartz glass
- thin film
- joint structure
- film resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Joints Allowing Movement (AREA)
- Gasket Seals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3717788U JPH0534398Y2 (cs) | 1988-03-23 | 1988-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3717788U JPH0534398Y2 (cs) | 1988-03-23 | 1988-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01141996U true JPH01141996U (cs) | 1989-09-28 |
| JPH0534398Y2 JPH0534398Y2 (cs) | 1993-08-31 |
Family
ID=31263756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3717788U Expired - Lifetime JPH0534398Y2 (cs) | 1988-03-23 | 1988-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534398Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04133430U (ja) * | 1991-03-22 | 1992-12-11 | 国際電気株式会社 | 半導体製造装置のガス管接続装置 |
-
1988
- 1988-03-23 JP JP3717788U patent/JPH0534398Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04133430U (ja) * | 1991-03-22 | 1992-12-11 | 国際電気株式会社 | 半導体製造装置のガス管接続装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0534398Y2 (cs) | 1993-08-31 |