JPH01141760U - - Google Patents

Info

Publication number
JPH01141760U
JPH01141760U JP3334988U JP3334988U JPH01141760U JP H01141760 U JPH01141760 U JP H01141760U JP 3334988 U JP3334988 U JP 3334988U JP 3334988 U JP3334988 U JP 3334988U JP H01141760 U JPH01141760 U JP H01141760U
Authority
JP
Japan
Prior art keywords
wall portion
spherical convex
convex wall
curvature
storage part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3334988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3334988U priority Critical patent/JPH01141760U/ja
Publication of JPH01141760U publication Critical patent/JPH01141760U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3334988U 1988-03-14 1988-03-14 Pending JPH01141760U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3334988U JPH01141760U (US20020051482A1-20020502-M00012.png) 1988-03-14 1988-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3334988U JPH01141760U (US20020051482A1-20020502-M00012.png) 1988-03-14 1988-03-14

Publications (1)

Publication Number Publication Date
JPH01141760U true JPH01141760U (US20020051482A1-20020502-M00012.png) 1989-09-28

Family

ID=31260011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3334988U Pending JPH01141760U (US20020051482A1-20020502-M00012.png) 1988-03-14 1988-03-14

Country Status (1)

Country Link
JP (1) JPH01141760U (US20020051482A1-20020502-M00012.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09209131A (ja) * 1996-02-08 1997-08-12 Ricoh Co Ltd 薄膜形成装置
JPH09228046A (ja) * 1996-02-23 1997-09-02 Ricoh Co Ltd 巻き取り式成膜装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09209131A (ja) * 1996-02-08 1997-08-12 Ricoh Co Ltd 薄膜形成装置
JPH09228046A (ja) * 1996-02-23 1997-09-02 Ricoh Co Ltd 巻き取り式成膜装置

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