JPH01141274U - - Google Patents

Info

Publication number
JPH01141274U
JPH01141274U JP3647088U JP3647088U JPH01141274U JP H01141274 U JPH01141274 U JP H01141274U JP 3647088 U JP3647088 U JP 3647088U JP 3647088 U JP3647088 U JP 3647088U JP H01141274 U JPH01141274 U JP H01141274U
Authority
JP
Japan
Prior art keywords
gasket
lid
mouth
container
airtightly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3647088U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3647088U priority Critical patent/JPH01141274U/ja
Publication of JPH01141274U publication Critical patent/JPH01141274U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例を示す部分断面側
面図、第２図は従来装置の部分断面側面図である
。 図中、１はガロンビン、２，３はホース、５は
薬液、６はフタ、７はキヤツプ、８はパツキンで
ある。なお、各図中同一符号は同一又は相当部分
を示す。 FIG. 1 is a partially sectional side view showing an embodiment of this invention, and FIG. 2 is a partially sectional side view of a conventional device. In the figure, 1 is a gallon bottle, 2 and 3 are hoses, 5 is a chemical solution, 6 is a lid, 7 is a cap, and 8 is a gasket. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 薬液を収容し、口部を有する容器、上記口部の
開口を封止するパツキン、このパツキンを覆うフ
タ、このフタと上記パツキンを気密に貫通し、上
記容器内にエアを導入する第１のホース、上記フ
タと上記パツキンを気密に貫通し、上記容器の液
内に一端が開口する第２のホース、及び両端が開
口されて上記口部外周に螺合され、上記フタと上
記パツキンを上記口部の開口端に圧接する筒状の
キヤツプを備えたレジスト塗布装置の薬液供給瓶
。 A container for containing a medicinal solution and having a mouth, a gasket for sealing the opening of the mouth, a lid for covering the gasket, and a first tube that airtightly penetrates the lid and the gasket to introduce air into the container. a second hose that airtightly passes through the lid and the gasket and has one end opened into the liquid in the container; A chemical supply bottle for a resist coating device equipped with a cylindrical cap that presses against the open end of the mouth.
JP3647088U 1988-03-18 1988-03-18 Pending JPH01141274U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3647088U JPH01141274U (en) 1988-03-18 1988-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3647088U JPH01141274U (en) 1988-03-18 1988-03-18

Publications (1)

Publication Number Publication Date
JPH01141274U true JPH01141274U (en) 1989-09-27

Family

ID=31263072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3647088U Pending JPH01141274U (en) 1988-03-18 1988-03-18

Country Status (1)

Country Link
JP (1) JPH01141274U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008006325A (en) * 2006-06-27 2008-01-17 Tokyo Electron Ltd Pressurization-type treating liquid supply device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008006325A (en) * 2006-06-27 2008-01-17 Tokyo Electron Ltd Pressurization-type treating liquid supply device
JP4693175B2 (en) * 2006-06-27 2011-06-01 東京エレクトロン株式会社 Pressurized processing liquid supply device

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