JPH01140830U - - Google Patents
Info
- Publication number
- JPH01140830U JPH01140830U JP3633488U JP3633488U JPH01140830U JP H01140830 U JPH01140830 U JP H01140830U JP 3633488 U JP3633488 U JP 3633488U JP 3633488 U JP3633488 U JP 3633488U JP H01140830 U JPH01140830 U JP H01140830U
- Authority
- JP
- Japan
- Prior art keywords
- support
- transfer arm
- wafer
- groove
- metal pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 2
Landscapes
- Specific Conveyance Elements (AREA)
- Feeding Of Articles To Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3633488U JPH01140830U (enExample) | 1988-03-22 | 1988-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3633488U JPH01140830U (enExample) | 1988-03-22 | 1988-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01140830U true JPH01140830U (enExample) | 1989-09-27 |
Family
ID=31262944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3633488U Pending JPH01140830U (enExample) | 1988-03-22 | 1988-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01140830U (enExample) |
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1988
- 1988-03-22 JP JP3633488U patent/JPH01140830U/ja active Pending