JPH01140830U - - Google Patents

Info

Publication number
JPH01140830U
JPH01140830U JP3633488U JP3633488U JPH01140830U JP H01140830 U JPH01140830 U JP H01140830U JP 3633488 U JP3633488 U JP 3633488U JP 3633488 U JP3633488 U JP 3633488U JP H01140830 U JPH01140830 U JP H01140830U
Authority
JP
Japan
Prior art keywords
support
transfer arm
wafer
groove
metal pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3633488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3633488U priority Critical patent/JPH01140830U/ja
Publication of JPH01140830U publication Critical patent/JPH01140830U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Feeding Of Articles To Conveyors (AREA)
JP3633488U 1988-03-22 1988-03-22 Pending JPH01140830U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3633488U JPH01140830U (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3633488U JPH01140830U (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Publications (1)

Publication Number Publication Date
JPH01140830U true JPH01140830U (enrdf_load_stackoverflow) 1989-09-27

Family

ID=31262944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3633488U Pending JPH01140830U (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Country Status (1)

Country Link
JP (1) JPH01140830U (enrdf_load_stackoverflow)

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