JPH01140824U - - Google Patents

Info

Publication number

JPH01140824U

JPH01140824U JP3653288U JP3653288U JPH01140824U JP H01140824 U JPH01140824 U JP H01140824U JP 3653288 U JP3653288 U JP 3653288U JP 3653288 U JP3653288 U JP 3653288U JP H01140824 U JPH01140824 U JP H01140824U

Authority

JP

Japan

Prior art keywords

semiconductor wafer

holding member

side surfaces

rotating plate

immersing

Prior art date

1988-03-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000007788 liquid Substances 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2