JPH01140820U - - Google Patents
Info
- Publication number
- JPH01140820U JPH01140820U JP3628888U JP3628888U JPH01140820U JP H01140820 U JPH01140820 U JP H01140820U JP 3628888 U JP3628888 U JP 3628888U JP 3628888 U JP3628888 U JP 3628888U JP H01140820 U JPH01140820 U JP H01140820U
- Authority
- JP
- Japan
- Prior art keywords
- quartz component
- indicate
- life
- over time
- thickness direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000126 substance Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3628888U JPH01140820U (th) | 1988-03-22 | 1988-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3628888U JPH01140820U (th) | 1988-03-22 | 1988-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01140820U true JPH01140820U (th) | 1989-09-27 |
Family
ID=31262900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3628888U Pending JPH01140820U (th) | 1988-03-22 | 1988-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01140820U (th) |
-
1988
- 1988-03-22 JP JP3628888U patent/JPH01140820U/ja active Pending