JPH01140147U - - Google Patents
Info
- Publication number
- JPH01140147U JPH01140147U JP3699588U JP3699588U JPH01140147U JP H01140147 U JPH01140147 U JP H01140147U JP 3699588 U JP3699588 U JP 3699588U JP 3699588 U JP3699588 U JP 3699588U JP H01140147 U JPH01140147 U JP H01140147U
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- resonance frequency
- wave resonator
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Description
第１図は本考案の一実施例に係る表面弾性波共
振子１及び発熱体２の構成を示す斜視図、第２図
は本考案の一実施例の内部回路図である。
１……表面弾性波共振子、２……発熱体、３…
…発振回路、５……カウンタ、７……ラツチ、８
……デコーダ、９……表示部。
FIG. 1 is a perspective view showing the configuration of a surface acoustic wave resonator 1 and a heating element 2 according to an embodiment of the present invention, and FIG. 2 is an internal circuit diagram of an embodiment of the present invention. 1...Surface acoustic wave resonator, 2...Heating element, 3...
...Oscillation circuit, 5...Counter, 7...Latch, 8
...Decoder, 9...Display section.
Claims (1)
子と、 該表面弾性波共振子の共振周波数を検出し、こ
れに基づき真空度を求める手段とを備えたことを
特徴とする表面弾性波真空計。[Scope of Claim for Utility Model Registration] A surface acoustic wave resonator provided integrally with a heating element, and means for detecting the resonance frequency of the surface acoustic wave resonator and determining the degree of vacuum based on the detected resonance frequency. A surface acoustic wave vacuum gauge featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988036995U JPH084584Y2 (en) | 1988-03-19 | 1988-03-19 | Surface acoustic wave vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988036995U JPH084584Y2 (en) | 1988-03-19 | 1988-03-19 | Surface acoustic wave vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01140147U true JPH01140147U (en) | 1989-09-26 |
| JPH084584Y2 JPH084584Y2 (en) | 1996-02-07 |
Family
ID=31263582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988036995U Expired - Lifetime JPH084584Y2 (en) | 1988-03-19 | 1988-03-19 | Surface acoustic wave vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH084584Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138480A (en) * | 1978-04-20 | 1979-10-26 | Toshiba Corp | Temperature detector |
| JPS61240135A (en) * | 1985-04-17 | 1986-10-25 | Yamatake Honeywell Co Ltd | Vacuum gauge |
-
1988
- 1988-03-19 JP JP1988036995U patent/JPH084584Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138480A (en) * | 1978-04-20 | 1979-10-26 | Toshiba Corp | Temperature detector |
| JPS61240135A (en) * | 1985-04-17 | 1986-10-25 | Yamatake Honeywell Co Ltd | Vacuum gauge |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH084584Y2 (en) | 1996-02-07 |