JPH01140139U - - Google Patents

Info

Publication number
JPH01140139U
JPH01140139U JP3633588U JP3633588U JPH01140139U JP H01140139 U JPH01140139 U JP H01140139U JP 3633588 U JP3633588 U JP 3633588U JP 3633588 U JP3633588 U JP 3633588U JP H01140139 U JPH01140139 U JP H01140139U
Authority
JP
Japan
Prior art keywords
processing
light irradiation
light
processing chamber
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3633588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3633588U priority Critical patent/JPH01140139U/ja
Publication of JPH01140139U publication Critical patent/JPH01140139U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP3633588U 1988-03-22 1988-03-22 Pending JPH01140139U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3633588U JPH01140139U (OSRAM) 1988-03-22 1988-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3633588U JPH01140139U (OSRAM) 1988-03-22 1988-03-22

Publications (1)

Publication Number Publication Date
JPH01140139U true JPH01140139U (OSRAM) 1989-09-26

Family

ID=31262945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3633588U Pending JPH01140139U (OSRAM) 1988-03-22 1988-03-22

Country Status (1)

Country Link
JP (1) JPH01140139U (OSRAM)

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