JPH01139830U - - Google Patents
Info
- Publication number
- JPH01139830U JPH01139830U JP3670188U JP3670188U JPH01139830U JP H01139830 U JPH01139830 U JP H01139830U JP 3670188 U JP3670188 U JP 3670188U JP 3670188 U JP3670188 U JP 3670188U JP H01139830 U JPH01139830 U JP H01139830U
- Authority
- JP
- Japan
- Prior art keywords
- processing apparatus
- plasma processing
- hollow tube
- plasma
- honeycomb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009832 plasma treatment Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3670188U JPH0517151Y2 (pl) | 1988-03-18 | 1988-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3670188U JPH0517151Y2 (pl) | 1988-03-18 | 1988-03-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01139830U true JPH01139830U (pl) | 1989-09-25 |
| JPH0517151Y2 JPH0517151Y2 (pl) | 1993-05-10 |
Family
ID=31263291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3670188U Expired - Lifetime JPH0517151Y2 (pl) | 1988-03-18 | 1988-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517151Y2 (pl) |
-
1988
- 1988-03-18 JP JP3670188U patent/JPH0517151Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0517151Y2 (pl) | 1993-05-10 |