JPH01139433U - - Google Patents

Info

Publication number
JPH01139433U
JPH01139433U JP3563088U JP3563088U JPH01139433U JP H01139433 U JPH01139433 U JP H01139433U JP 3563088 U JP3563088 U JP 3563088U JP 3563088 U JP3563088 U JP 3563088U JP H01139433 U JPH01139433 U JP H01139433U
Authority
JP
Japan
Prior art keywords
stocker
semiconductor wafers
carriers
protrusion
tilting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3563088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3563088U priority Critical patent/JPH01139433U/ja
Publication of JPH01139433U publication Critical patent/JPH01139433U/ja
Pending legal-status Critical Current

Links

JP3563088U 1988-03-16 1988-03-16 Pending JPH01139433U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3563088U JPH01139433U (US07655688-20100202-C00086.png) 1988-03-16 1988-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3563088U JPH01139433U (US07655688-20100202-C00086.png) 1988-03-16 1988-03-16

Publications (1)

Publication Number Publication Date
JPH01139433U true JPH01139433U (US07655688-20100202-C00086.png) 1989-09-22

Family

ID=31262273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3563088U Pending JPH01139433U (US07655688-20100202-C00086.png) 1988-03-16 1988-03-16

Country Status (1)

Country Link
JP (1) JPH01139433U (US07655688-20100202-C00086.png)

Similar Documents

Publication Publication Date Title
JPH01139433U (US07655688-20100202-C00086.png)
JPH01129837U (US07655688-20100202-C00086.png)
JPH0163137U (US07655688-20100202-C00086.png)
JPH01160839U (US07655688-20100202-C00086.png)
JPH01154182U (US07655688-20100202-C00086.png)
JPH0272546U (US07655688-20100202-C00086.png)
JPH0474694U (US07655688-20100202-C00086.png)
JPS62172153U (US07655688-20100202-C00086.png)
JPH0193738U (US07655688-20100202-C00086.png)
JPS59109147U (ja) ウエハ収納ケ−ス
JPS6418742U (US07655688-20100202-C00086.png)
JPS63177047U (US07655688-20100202-C00086.png)
JPS62140732U (US07655688-20100202-C00086.png)
JPH01145127U (US07655688-20100202-C00086.png)
JPH0345645U (US07655688-20100202-C00086.png)
JPH01143133U (US07655688-20100202-C00086.png)
JPS6380848U (US07655688-20100202-C00086.png)
JPS62191692U (US07655688-20100202-C00086.png)
JPS63177050U (US07655688-20100202-C00086.png)
JPH0432993U (US07655688-20100202-C00086.png)
JPS6416639U (US07655688-20100202-C00086.png)
JPS5916141U (ja) キヤリアケ−ス
JPH01129835U (US07655688-20100202-C00086.png)
JPS6170937U (US07655688-20100202-C00086.png)
JPH0242438U (US07655688-20100202-C00086.png)