JPH01139093U - - Google Patents
Info
- Publication number
- JPH01139093U JPH01139093U JP3396288U JP3396288U JPH01139093U JP H01139093 U JPH01139093 U JP H01139093U JP 3396288 U JP3396288 U JP 3396288U JP 3396288 U JP3396288 U JP 3396288U JP H01139093 U JPH01139093 U JP H01139093U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- thickness
- central part
- main body
- radius
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988033962U JP2528778Y2 (ja) | 1988-03-15 | 1988-03-15 | ポンプのダイヤフラムの構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988033962U JP2528778Y2 (ja) | 1988-03-15 | 1988-03-15 | ポンプのダイヤフラムの構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01139093U true JPH01139093U (et) | 1989-09-22 |
| JP2528778Y2 JP2528778Y2 (ja) | 1997-03-12 |
Family
ID=31260681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988033962U Expired - Lifetime JP2528778Y2 (ja) | 1988-03-15 | 1988-03-15 | ポンプのダイヤフラムの構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2528778Y2 (et) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000265945A (ja) * | 1998-11-10 | 2000-09-26 | Uct Kk | 薬液供給ポンプ、薬液供給装置、薬液供給システム、基板洗浄装置、薬液供給方法、及び基板洗浄方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102073119B1 (ko) * | 2018-06-28 | 2020-02-04 | 조성암 | 압출 펌핑모듈 및 이를 이용한 다아이프램 도료공급장치 |
| CN111102176A (zh) * | 2018-10-29 | 2020-05-05 | 日本电产株式会社 | 隔膜泵用隔膜片和隔膜泵 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4998804U (et) * | 1972-12-14 | 1974-08-26 | ||
| JPS578379A (en) * | 1980-05-16 | 1982-01-16 | Wagner Gmbh Josef | Diaphragm for high pressure booster pump, compressor and others |
-
1988
- 1988-03-15 JP JP1988033962U patent/JP2528778Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4998804U (et) * | 1972-12-14 | 1974-08-26 | ||
| JPS578379A (en) * | 1980-05-16 | 1982-01-16 | Wagner Gmbh Josef | Diaphragm for high pressure booster pump, compressor and others |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000265945A (ja) * | 1998-11-10 | 2000-09-26 | Uct Kk | 薬液供給ポンプ、薬液供給装置、薬液供給システム、基板洗浄装置、薬液供給方法、及び基板洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2528778Y2 (ja) | 1997-03-12 |