JPH01138554U - - Google Patents

Info

Publication number
JPH01138554U
JPH01138554U JP3120488U JP3120488U JPH01138554U JP H01138554 U JPH01138554 U JP H01138554U JP 3120488 U JP3120488 U JP 3120488U JP 3120488 U JP3120488 U JP 3120488U JP H01138554 U JPH01138554 U JP H01138554U
Authority
JP
Japan
Prior art keywords
wafer
rotation shaft
grindstone
fixing
grinding wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3120488U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3120488U priority Critical patent/JPH01138554U/ja
Publication of JPH01138554U publication Critical patent/JPH01138554U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案のウエハ面取装置の一実施例の
斜視図、第2図は同じく一実施例の総型砥石を傾
けた場合の面取形状を示す説明図、第3図は従来
のウエハ面取装置の斜視図、第4図a,bは砥石
による面取状態を示すものでaは総型砥石、bは
台形砥石の縦断側面図、第5図a,bはウエハの
形状を示すものでaは薄いウエハ、bは厚いウエ
ハの正面図である。 1:ウエハ回転軸、2:クランプ、3:ウエハ
、4:砥石駆動用モーター、5:砥石回転軸、6
a:総型砥石、8:回転台、9:固定用のビス穴
、9a:横方向に伸びたビス穴、10:固定台。
Fig. 1 is a perspective view of an embodiment of the wafer chamfering device of the present invention, Fig. 2 is an explanatory diagram showing the chamfer shape when the full-form grinding wheel of the embodiment is tilted, and Fig. 3 is a perspective view of a conventional wafer chamfering device. A perspective view of the wafer chamfering device, Figures 4a and b show the state of chamfering with a grindstone, where a is a full-sized grindstone, b is a longitudinal cross-sectional side view of a trapezoidal grindstone, and Figures 5a and b are views showing the shape of a wafer. In the figure, a is a front view of a thin wafer and b is a front view of a thick wafer. 1: Wafer rotation axis, 2: Clamp, 3: Wafer, 4: Grinding wheel drive motor, 5: Grinding wheel rotation axis, 6
a: General type grindstone, 8: Turning table, 9: Screw hole for fixing, 9a: Screw hole extending laterally, 10: Fixing table.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハ回転軸にクランプを介して取付けられた
ウエハの外周を、砥石駆動用モーターで駆動され
、かつその中心軸が前記ウエハ回転軸の中心軸と
対向している砥石回転軸に取付けられた総型砥石
で面取りするウエハ面取装置において、前記砥石
回転軸及び砥石駆動用モーターの外側にこれら回
転軸、モーターを保持する回転台を設けると共に
、この回転台の外側に固定用のビス穴と横方向に
伸びたビス穴とを有する固定台を設け、これらビ
ス穴を介して前記回転台を前記固定台に固定する
ようにしたことを特徴とするウエハ面取装置。
A general mold that is attached to a grindstone rotation shaft whose outer circumference of the wafer is attached to the wafer rotation shaft via a clamp and is driven by a grindstone drive motor, and whose center axis faces the center axis of the wafer rotation shaft. In a wafer chamfering device that performs chamfering with a grindstone, a rotating table for holding the rotating shaft and the motor is provided outside the grinding wheel rotation shaft and the grinding wheel drive motor, and a screw hole for fixing and a horizontal direction are provided on the outside of the rotating table. 1. A wafer chamfering apparatus characterized in that a fixing table is provided with screw holes extending into the wafer, and the rotary table is fixed to the fixing table through these screw holes.
JP3120488U 1988-03-09 1988-03-09 Pending JPH01138554U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3120488U JPH01138554U (en) 1988-03-09 1988-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3120488U JPH01138554U (en) 1988-03-09 1988-03-09

Publications (1)

Publication Number Publication Date
JPH01138554U true JPH01138554U (en) 1989-09-21

Family

ID=31256895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3120488U Pending JPH01138554U (en) 1988-03-09 1988-03-09

Country Status (1)

Country Link
JP (1) JPH01138554U (en)

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