JPH01138554U - - Google Patents
Info
- Publication number
- JPH01138554U JPH01138554U JP3120488U JP3120488U JPH01138554U JP H01138554 U JPH01138554 U JP H01138554U JP 3120488 U JP3120488 U JP 3120488U JP 3120488 U JP3120488 U JP 3120488U JP H01138554 U JPH01138554 U JP H01138554U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotation shaft
- grindstone
- fixing
- grinding wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Description
第1図は本考案のウエハ面取装置の一実施例の
斜視図、第2図は同じく一実施例の総型砥石を傾
けた場合の面取形状を示す説明図、第3図は従来
のウエハ面取装置の斜視図、第4図a,bは砥石
による面取状態を示すものでaは総型砥石、bは
台形砥石の縦断側面図、第5図a,bはウエハの
形状を示すものでaは薄いウエハ、bは厚いウエ
ハの正面図である。
1:ウエハ回転軸、2:クランプ、3:ウエハ
、4:砥石駆動用モーター、5:砥石回転軸、6
a:総型砥石、8:回転台、9:固定用のビス穴
、9a:横方向に伸びたビス穴、10:固定台。
Fig. 1 is a perspective view of an embodiment of the wafer chamfering device of the present invention, Fig. 2 is an explanatory diagram showing the chamfer shape when the full-form grinding wheel of the embodiment is tilted, and Fig. 3 is a perspective view of a conventional wafer chamfering device. A perspective view of the wafer chamfering device, Figures 4a and b show the state of chamfering with a grindstone, where a is a full-sized grindstone, b is a longitudinal cross-sectional side view of a trapezoidal grindstone, and Figures 5a and b are views showing the shape of a wafer. In the figure, a is a front view of a thin wafer and b is a front view of a thick wafer. 1: Wafer rotation axis, 2: Clamp, 3: Wafer, 4: Grinding wheel drive motor, 5: Grinding wheel rotation axis, 6
a: General type grindstone, 8: Turning table, 9: Screw hole for fixing, 9a: Screw hole extending laterally, 10: Fixing table.
Claims (1)
ウエハの外周を、砥石駆動用モーターで駆動され
、かつその中心軸が前記ウエハ回転軸の中心軸と
対向している砥石回転軸に取付けられた総型砥石
で面取りするウエハ面取装置において、前記砥石
回転軸及び砥石駆動用モーターの外側にこれら回
転軸、モーターを保持する回転台を設けると共に
、この回転台の外側に固定用のビス穴と横方向に
伸びたビス穴とを有する固定台を設け、これらビ
ス穴を介して前記回転台を前記固定台に固定する
ようにしたことを特徴とするウエハ面取装置。 A general mold that is attached to a grindstone rotation shaft whose outer circumference of the wafer is attached to the wafer rotation shaft via a clamp and is driven by a grindstone drive motor, and whose center axis faces the center axis of the wafer rotation shaft. In a wafer chamfering device that performs chamfering with a grindstone, a rotating table for holding the rotating shaft and the motor is provided outside the grinding wheel rotation shaft and the grinding wheel drive motor, and a screw hole for fixing and a horizontal direction are provided on the outside of the rotating table. 1. A wafer chamfering apparatus characterized in that a fixing table is provided with screw holes extending into the wafer, and the rotary table is fixed to the fixing table through these screw holes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3120488U JPH01138554U (en) | 1988-03-09 | 1988-03-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3120488U JPH01138554U (en) | 1988-03-09 | 1988-03-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01138554U true JPH01138554U (en) | 1989-09-21 |
Family
ID=31256895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3120488U Pending JPH01138554U (en) | 1988-03-09 | 1988-03-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01138554U (en) |
-
1988
- 1988-03-09 JP JP3120488U patent/JPH01138554U/ja active Pending
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