JPH01138554U

JPH01138554U -

Info

Publication number: JPH01138554U
Application number: JP3120488U
Authority: JP
Priority date: 1988-03-09
Filing date: 1988-03-09
Publication date: 1989-09-21

Description

[Brief explanation of the drawing]

第１図は本考案のウエハ面取装置の一実施例の
斜視図、第２図は同じく一実施例の総型砥石を傾
けた場合の面取形状を示す説明図、第３図は従来
のウエハ面取装置の斜視図、第４図ａ，ｂは砥石
による面取状態を示すものでａは総型砥石、ｂは
台形砥石の縦断側面図、第５図ａ，ｂはウエハの
形状を示すものでａは薄いウエハ、ｂは厚いウエ
ハの正面図である。１：ウエハ回転軸、２：クランプ、３：ウエハ
、４：砥石駆動用モーター、５：砥石回転軸、６
ａ：総型砥石、８：回転台、９：固定用のビス穴
、９ａ：横方向に伸びたビス穴、１０：固定台。 Fig. 1 is a perspective view of an embodiment of the wafer chamfering device of the present invention, Fig. 2 is an explanatory diagram showing the chamfer shape when the full-form grinding wheel of the embodiment is tilted, and Fig. 3 is a perspective view of a conventional wafer chamfering device. A perspective view of the wafer chamfering device, Figures 4a and b show the state of chamfering with a grindstone, where a is a full-sized grindstone, b is a longitudinal cross-sectional side view of a trapezoidal grindstone, and Figures 5a and b are views showing the shape of a wafer. In the figure, a is a front view of a thin wafer and b is a front view of a thick wafer. 1: Wafer rotation axis, 2: Clamp, 3: Wafer, 4: Grinding wheel drive motor, 5: Grinding wheel rotation axis, 6
a: General type grindstone, 8: Turning table, 9: Screw hole for fixing, 9a: Screw hole extending laterally, 10: Fixing table.

Claims

[Scope of utility model registration request]

A general mold that is attached to a grindstone rotation shaft whose outer circumference of the wafer is attached to the wafer rotation shaft via a clamp and is driven by a grindstone drive motor, and whose center axis faces the center axis of the wafer rotation shaft. In a wafer chamfering device that performs chamfering with a grindstone, a rotating table for holding the rotating shaft and the motor is provided outside the grinding wheel rotation shaft and the grinding wheel drive motor, and a screw hole for fixing and a horizontal direction are provided on the outside of the rotating table. 1. A wafer chamfering apparatus characterized in that a fixing table is provided with screw holes extending into the wafer, and the rotary table is fixed to the fixing table through these screw holes.