JPH01137531U - - Google Patents
Info
- Publication number
- JPH01137531U JPH01137531U JP3339488U JP3339488U JPH01137531U JP H01137531 U JPH01137531 U JP H01137531U JP 3339488 U JP3339488 U JP 3339488U JP 3339488 U JP3339488 U JP 3339488U JP H01137531 U JPH01137531 U JP H01137531U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- overflow
- semiconductor
- utility
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3339488U JPH01137531U (enExample) | 1988-03-14 | 1988-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3339488U JPH01137531U (enExample) | 1988-03-14 | 1988-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137531U true JPH01137531U (enExample) | 1989-09-20 |
Family
ID=31260074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3339488U Pending JPH01137531U (enExample) | 1988-03-14 | 1988-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137531U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5710239A (en) * | 1980-06-20 | 1982-01-19 | Hitachi Ltd | Washing method and apparatus thereof |
-
1988
- 1988-03-14 JP JP3339488U patent/JPH01137531U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5710239A (en) * | 1980-06-20 | 1982-01-19 | Hitachi Ltd | Washing method and apparatus thereof |