JPH01137530U - - Google Patents

Info

Publication number
JPH01137530U
JPH01137530U JP3304388U JP3304388U JPH01137530U JP H01137530 U JPH01137530 U JP H01137530U JP 3304388 U JP3304388 U JP 3304388U JP 3304388 U JP3304388 U JP 3304388U JP H01137530 U JPH01137530 U JP H01137530U
Authority
JP
Japan
Prior art keywords
introducer
shutter
rotational motion
processing chamber
vacuum processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3304388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3304388U priority Critical patent/JPH01137530U/ja
Publication of JPH01137530U publication Critical patent/JPH01137530U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3304388U 1988-03-11 1988-03-11 Pending JPH01137530U (forum.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3304388U JPH01137530U (forum.php) 1988-03-11 1988-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3304388U JPH01137530U (forum.php) 1988-03-11 1988-03-11

Publications (1)

Publication Number Publication Date
JPH01137530U true JPH01137530U (forum.php) 1989-09-20

Family

ID=31259677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3304388U Pending JPH01137530U (forum.php) 1988-03-11 1988-03-11

Country Status (1)

Country Link
JP (1) JPH01137530U (forum.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11251298A (ja) * 1998-03-02 1999-09-17 Nec Kyushu Ltd ドライエッチング装置とその起動方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11251298A (ja) * 1998-03-02 1999-09-17 Nec Kyushu Ltd ドライエッチング装置とその起動方法

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