JPH01137474U - - Google Patents

Info

Publication number
JPH01137474U
JPH01137474U JP3412888U JP3412888U JPH01137474U JP H01137474 U JPH01137474 U JP H01137474U JP 3412888 U JP3412888 U JP 3412888U JP 3412888 U JP3412888 U JP 3412888U JP H01137474 U JPH01137474 U JP H01137474U
Authority
JP
Japan
Prior art keywords
acceleration sensor
heat insulator
thermal conductor
conductive resin
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3412888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0639335Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988034128U priority Critical patent/JPH0639335Y2/ja
Publication of JPH01137474U publication Critical patent/JPH01137474U/ja
Application granted granted Critical
Publication of JPH0639335Y2 publication Critical patent/JPH0639335Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Micromachines (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP1988034128U 1988-03-14 1988-03-14 加速度センサ Expired - Lifetime JPH0639335Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988034128U JPH0639335Y2 (ja) 1988-03-14 1988-03-14 加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988034128U JPH0639335Y2 (ja) 1988-03-14 1988-03-14 加速度センサ

Publications (2)

Publication Number Publication Date
JPH01137474U true JPH01137474U (US06521211-20030218-C00004.png) 1989-09-20
JPH0639335Y2 JPH0639335Y2 (ja) 1994-10-12

Family

ID=31260847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988034128U Expired - Lifetime JPH0639335Y2 (ja) 1988-03-14 1988-03-14 加速度センサ

Country Status (1)

Country Link
JP (1) JPH0639335Y2 (US06521211-20030218-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013186108A (ja) * 2012-03-12 2013-09-19 Seiko Epson Corp 物理量センサーモジュール及び電子機器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50137583A (US06521211-20030218-C00004.png) * 1974-04-18 1975-10-31
JPS61181319U (US06521211-20030218-C00004.png) * 1985-05-02 1986-11-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50137583A (US06521211-20030218-C00004.png) * 1974-04-18 1975-10-31
JPS61181319U (US06521211-20030218-C00004.png) * 1985-05-02 1986-11-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013186108A (ja) * 2012-03-12 2013-09-19 Seiko Epson Corp 物理量センサーモジュール及び電子機器

Also Published As

Publication number Publication date
JPH0639335Y2 (ja) 1994-10-12

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