JPH01135734U - - Google Patents

Info

Publication number
JPH01135734U
JPH01135734U JP3075688U JP3075688U JPH01135734U JP H01135734 U JPH01135734 U JP H01135734U JP 3075688 U JP3075688 U JP 3075688U JP 3075688 U JP3075688 U JP 3075688U JP H01135734 U JPH01135734 U JP H01135734U
Authority
JP
Japan
Prior art keywords
boat
process tube
purge
mounting table
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3075688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3075688U priority Critical patent/JPH01135734U/ja
Publication of JPH01135734U publication Critical patent/JPH01135734U/ja
Pending legal-status Critical Current

Links

JP3075688U 1988-03-08 1988-03-08 Pending JPH01135734U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3075688U JPH01135734U (US20020051482A1-20020502-M00012.png) 1988-03-08 1988-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3075688U JPH01135734U (US20020051482A1-20020502-M00012.png) 1988-03-08 1988-03-08

Publications (1)

Publication Number Publication Date
JPH01135734U true JPH01135734U (US20020051482A1-20020502-M00012.png) 1989-09-18

Family

ID=31256101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3075688U Pending JPH01135734U (US20020051482A1-20020502-M00012.png) 1988-03-08 1988-03-08

Country Status (1)

Country Link
JP (1) JPH01135734U (US20020051482A1-20020502-M00012.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437025A (ja) * 1990-05-31 1992-02-07 Kyushu Electron Metal Co Ltd 気相成長装置
JP2010239142A (ja) * 2010-05-31 2010-10-21 Tokyo Electron Ltd 熱処理装置及び熱処理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012728A (ja) * 1983-07-01 1985-01-23 Hitachi Ltd 膜形成用電極構造体
JPS62171115A (ja) * 1986-01-23 1987-07-28 Sumitomo Electric Ind Ltd 気相成長装置の反応管

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012728A (ja) * 1983-07-01 1985-01-23 Hitachi Ltd 膜形成用電極構造体
JPS62171115A (ja) * 1986-01-23 1987-07-28 Sumitomo Electric Ind Ltd 気相成長装置の反応管

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437025A (ja) * 1990-05-31 1992-02-07 Kyushu Electron Metal Co Ltd 気相成長装置
JP2010239142A (ja) * 2010-05-31 2010-10-21 Tokyo Electron Ltd 熱処理装置及び熱処理方法

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