JPH01134786U - - Google Patents
Info
- Publication number
- JPH01134786U JPH01134786U JP3038388U JP3038388U JPH01134786U JP H01134786 U JPH01134786 U JP H01134786U JP 3038388 U JP3038388 U JP 3038388U JP 3038388 U JP3038388 U JP 3038388U JP H01134786 U JPH01134786 U JP H01134786U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- piezoelectric vibrator
- piezoelectric
- pump case
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 5
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3038388U JPH01134786U (de) | 1988-03-09 | 1988-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3038388U JPH01134786U (de) | 1988-03-09 | 1988-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01134786U true JPH01134786U (de) | 1989-09-14 |
Family
ID=31255404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3038388U Pending JPH01134786U (de) | 1988-03-09 | 1988-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01134786U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018035733A (ja) * | 2016-08-31 | 2018-03-08 | セイコーエプソン株式会社 | ポンプおよびロボットハンド |
-
1988
- 1988-03-09 JP JP3038388U patent/JPH01134786U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018035733A (ja) * | 2016-08-31 | 2018-03-08 | セイコーエプソン株式会社 | ポンプおよびロボットハンド |