JPH01133757U - - Google Patents

Info

Publication number

JPH01133757U

JPH01133757U JP3005988U JP3005988U JPH01133757U JP H01133757 U JPH01133757 U JP H01133757U JP 3005988 U JP3005988 U JP 3005988U JP 3005988 U JP3005988 U JP 3005988U JP H01133757 U JPH01133757 U JP H01133757U

Authority

JP

Japan

Prior art keywords

electrode

discharge

excimer laser

main

electrode body

Prior art date

1988-03-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
• 239000011248 coating agent Substances 0.000 claims description 2
• 238000000576 coating method Methods 0.000 claims description 2
• 229910052759 nickel Inorganic materials 0.000 claims description 2
• 229910001369 Brass Inorganic materials 0.000 claims 1
• 239000010951 brass Substances 0.000 claims 1
• 230000005284 excitation Effects 0.000 claims 1
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1