JPH01133739U - - Google Patents
Info
- Publication number
- JPH01133739U JPH01133739U JP2960788U JP2960788U JPH01133739U JP H01133739 U JPH01133739 U JP H01133739U JP 2960788 U JP2960788 U JP 2960788U JP 2960788 U JP2960788 U JP 2960788U JP H01133739 U JPH01133739 U JP H01133739U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder substrate
- holder
- claw
- formed near
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 210000000078 claw Anatomy 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2960788U JPH01133739U (zh) | 1988-03-04 | 1988-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2960788U JPH01133739U (zh) | 1988-03-04 | 1988-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133739U true JPH01133739U (zh) | 1989-09-12 |
Family
ID=31253968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2960788U Pending JPH01133739U (zh) | 1988-03-04 | 1988-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133739U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016139703A (ja) * | 2015-01-28 | 2016-08-04 | 株式会社島津製作所 | 基板支持具 |
-
1988
- 1988-03-04 JP JP2960788U patent/JPH01133739U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016139703A (ja) * | 2015-01-28 | 2016-08-04 | 株式会社島津製作所 | 基板支持具 |