JPH01133731U - - Google Patents

Info

Publication number

JPH01133731U

JPH01133731U JP2960688U JP2960688U JPH01133731U JP H01133731 U JPH01133731 U JP H01133731U JP 2960688 U JP2960688 U JP 2960688U JP 2960688 U JP2960688 U JP 2960688U JP H01133731 U JPH01133731 U JP H01133731U

Authority

JP

Japan

Prior art keywords

wafer

mounting surface

supported

support pins

quartz holder

Prior art date

1988-03-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 5
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
• 230000002093 peripheral effect Effects 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• 238000001947 vapour-phase growth Methods 0.000 claims 1
• 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)