JPH01133730U - - Google Patents
Info
- Publication number
- JPH01133730U JPH01133730U JP2560788U JP2560788U JPH01133730U JP H01133730 U JPH01133730 U JP H01133730U JP 2560788 U JP2560788 U JP 2560788U JP 2560788 U JP2560788 U JP 2560788U JP H01133730 U JPH01133730 U JP H01133730U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- respect
- processing head
- semiconductor
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000007790 scraping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560788U JPH01133730U (id) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560788U JPH01133730U (id) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133730U true JPH01133730U (id) | 1989-09-12 |
Family
ID=31246489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2560788U Pending JPH01133730U (id) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133730U (id) |
-
1988
- 1988-02-26 JP JP2560788U patent/JPH01133730U/ja active Pending