JPH01130542U - - Google Patents

Info

Publication number
JPH01130542U
JPH01130542U JP2779188U JP2779188U JPH01130542U JP H01130542 U JPH01130542 U JP H01130542U JP 2779188 U JP2779188 U JP 2779188U JP 2779188 U JP2779188 U JP 2779188U JP H01130542 U JPH01130542 U JP H01130542U
Authority
JP
Japan
Prior art keywords
side walls
wafers
semiconductor wafer
storage jig
wafer storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2779188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2779188U priority Critical patent/JPH01130542U/ja
Publication of JPH01130542U publication Critical patent/JPH01130542U/ja
Pending legal-status Critical Current

Links

JP2779188U 1988-03-01 1988-03-01 Pending JPH01130542U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2779188U JPH01130542U (US08063081-20111122-C00044.png) 1988-03-01 1988-03-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2779188U JPH01130542U (US08063081-20111122-C00044.png) 1988-03-01 1988-03-01

Publications (1)

Publication Number Publication Date
JPH01130542U true JPH01130542U (US08063081-20111122-C00044.png) 1989-09-05

Family

ID=31250594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2779188U Pending JPH01130542U (US08063081-20111122-C00044.png) 1988-03-01 1988-03-01

Country Status (1)

Country Link
JP (1) JPH01130542U (US08063081-20111122-C00044.png)

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