JPH01130528U - - Google Patents

Info

Publication number

JPH01130528U

JPH01130528U JP2779288U JP2779288U JPH01130528U JP H01130528 U JPH01130528 U JP H01130528U JP 2779288 U JP2779288 U JP 2779288U JP 2779288 U JP2779288 U JP 2779288U JP H01130528 U JPH01130528 U JP H01130528U

Authority

JP

Japan

Prior art keywords

tank

wet etching

etching device

sloped

side wall

Prior art date

1988-03-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001039 wet etching Methods 0.000 claims description 5
• 239000000126 substance Substances 0.000 claims description 3
• 238000001914 filtration Methods 0.000 claims 1
• 239000007788 liquid Substances 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 1