JPH01130527U - - Google Patents
Info
- Publication number
- JPH01130527U JPH01130527U JP2779488U JP2779488U JPH01130527U JP H01130527 U JPH01130527 U JP H01130527U JP 2779488 U JP2779488 U JP 2779488U JP 2779488 U JP2779488 U JP 2779488U JP H01130527 U JPH01130527 U JP H01130527U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- spray nozzle
- liquid
- liquid mixing
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 239000007921 spray Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2779488U JPH01130527U (en, 2012) | 1988-03-01 | 1988-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2779488U JPH01130527U (en, 2012) | 1988-03-01 | 1988-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130527U true JPH01130527U (en, 2012) | 1989-09-05 |
Family
ID=31250600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2779488U Pending JPH01130527U (en, 2012) | 1988-03-01 | 1988-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130527U (en, 2012) |
-
1988
- 1988-03-01 JP JP2779488U patent/JPH01130527U/ja active Pending