JPH01130096U - - Google Patents
Info
- Publication number
- JPH01130096U JPH01130096U JP2697888U JP2697888U JPH01130096U JP H01130096 U JPH01130096 U JP H01130096U JP 2697888 U JP2697888 U JP 2697888U JP 2697888 U JP2697888 U JP 2697888U JP H01130096 U JPH01130096 U JP H01130096U
- Authority
- JP
- Japan
- Prior art keywords
- iron core
- core member
- outer periphery
- turbo molecular
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000035699 permeability Effects 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
図面は、本考案の一実施例をターボ分子ポンプ
に適用した状態で示す部分的な側断面図である。
１…ベーキングヒータ、２…ターボ分子ポンプ
、９…外筒、１２…鉄芯部材、１３…電熱線、ｍ
…軸心、ｌ…軸心と交叉（直交）する方向、Ｈ…
磁界。
The drawing is a partial side sectional view showing an embodiment of the present invention applied to a turbo-molecular pump. DESCRIPTION OF SYMBOLS 1...Baking heater, 2...Turbo molecular pump, 9...Outer cylinder, 12...Iron core member, 13...Heating wire, m
...axis center, l...direction intersecting (orthogonal to) the axis center, H...
magnetic field.
Claims (1)
率の高い鉄芯部材を配設し、この鉄芯部材の外周
に、通電によつて前記ターボ分子ポンプ内に該ポ
ンプの軸心と交叉する方向の磁界を発生させる電
熱線を巻着したことを特徴とするターボ分子ポン
プ用ベーキングヒータ。 An iron core member with high magnetic permeability is disposed in contact with the outer periphery of the outer cylinder of the turbo molecular pump, and the outer periphery of the iron core member is caused to intersect with the axis of the pump within the turbo molecular pump by energizing the outer periphery of the iron core member. A baking heater for a turbo molecular pump characterized by having a heating wire wrapped around it that generates a directional magnetic field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2697888U JPH01130096U (en) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2697888U JPH01130096U (en) | 1988-02-29 | 1988-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130096U true JPH01130096U (en) | 1989-09-05 |
Family
ID=31249083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2697888U Pending JPH01130096U (en) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130096U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0512691U (en) * | 1991-07-24 | 1993-02-19 | 株式会社島津製作所 | Turbo molecular pump |
| WO2022264924A1 (en) * | 2021-06-18 | 2022-12-22 | エドワーズ株式会社 | Vacuum pump |
-
1988
- 1988-02-29 JP JP2697888U patent/JPH01130096U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0512691U (en) * | 1991-07-24 | 1993-02-19 | 株式会社島津製作所 | Turbo molecular pump |
| WO2022264924A1 (en) * | 2021-06-18 | 2022-12-22 | エドワーズ株式会社 | Vacuum pump |