JPH01129836U - - Google Patents
Info
- Publication number
- JPH01129836U JPH01129836U JP2423788U JP2423788U JPH01129836U JP H01129836 U JPH01129836 U JP H01129836U JP 2423788 U JP2423788 U JP 2423788U JP 2423788 U JP2423788 U JP 2423788U JP H01129836 U JPH01129836 U JP H01129836U
- Authority
- JP
- Japan
- Prior art keywords
- locking piece
- buffer plate
- upper buffer
- piece
- elastic piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2423788U JPH062272Y2 (ja) | 1988-02-25 | 1988-02-25 | ウェーハ容器の上部緩衝板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2423788U JPH062272Y2 (ja) | 1988-02-25 | 1988-02-25 | ウェーハ容器の上部緩衝板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01129836U true JPH01129836U (en:Method) | 1989-09-04 |
| JPH062272Y2 JPH062272Y2 (ja) | 1994-01-19 |
Family
ID=31243919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2423788U Expired - Lifetime JPH062272Y2 (ja) | 1988-02-25 | 1988-02-25 | ウェーハ容器の上部緩衝板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062272Y2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023233554A1 (ja) * | 2022-05-31 | 2023-12-07 | ミライアル株式会社 | 基板収納容器及び蓋体側基板支持部 |
| WO2024252672A1 (ja) * | 2023-06-09 | 2024-12-12 | ミライアル株式会社 | 基板収納容器 |
-
1988
- 1988-02-25 JP JP2423788U patent/JPH062272Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023233554A1 (ja) * | 2022-05-31 | 2023-12-07 | ミライアル株式会社 | 基板収納容器及び蓋体側基板支持部 |
| WO2024252672A1 (ja) * | 2023-06-09 | 2024-12-12 | ミライアル株式会社 | 基板収納容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062272Y2 (ja) | 1994-01-19 |