JPH01129830U - - Google Patents

Info

Publication number
JPH01129830U
JPH01129830U JP2560488U JP2560488U JPH01129830U JP H01129830 U JPH01129830 U JP H01129830U JP 2560488 U JP2560488 U JP 2560488U JP 2560488 U JP2560488 U JP 2560488U JP H01129830 U JPH01129830 U JP H01129830U
Authority
JP
Japan
Prior art keywords
support
semiconductor wafer
support plate
moves
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2560488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2560488U priority Critical patent/JPH01129830U/ja
Publication of JPH01129830U publication Critical patent/JPH01129830U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP2560488U 1988-02-26 1988-02-26 Pending JPH01129830U (US06653308-20031125-C00197.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2560488U JPH01129830U (US06653308-20031125-C00197.png) 1988-02-26 1988-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2560488U JPH01129830U (US06653308-20031125-C00197.png) 1988-02-26 1988-02-26

Publications (1)

Publication Number Publication Date
JPH01129830U true JPH01129830U (US06653308-20031125-C00197.png) 1989-09-04

Family

ID=31246483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2560488U Pending JPH01129830U (US06653308-20031125-C00197.png) 1988-02-26 1988-02-26

Country Status (1)

Country Link
JP (1) JPH01129830U (US06653308-20031125-C00197.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146971A (ja) * 1984-08-13 1986-03-07 Mita Ind Co Ltd 感光体ドラムの除電方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146971A (ja) * 1984-08-13 1986-03-07 Mita Ind Co Ltd 感光体ドラムの除電方法

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