JPH01129823U - - Google Patents

Info

Publication number

JPH01129823U

JPH01129823U JP2422288U JP2422288U JPH01129823U JP H01129823 U JPH01129823 U JP H01129823U JP 2422288 U JP2422288 U JP 2422288U JP 2422288 U JP2422288 U JP 2422288U JP H01129823 U JPH01129823 U JP H01129823U

Authority

JP

Japan

Prior art keywords

alignment mark

device pattern

flat part

pattern formed

semiconductor substrate

Prior art date

1988-02-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 2
• 238000005530 etching Methods 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 3
• 239000013039 cover film Substances 0.000 description 1