JPH01129275U - - Google Patents

Info

Publication number

JPH01129275U

JPH01129275U JP2268488U JP2268488U JPH01129275U JP H01129275 U JPH01129275 U JP H01129275U JP 2268488 U JP2268488 U JP 2268488U JP 2268488 U JP2268488 U JP 2268488U JP H01129275 U JPH01129275 U JP H01129275U

Authority

JP

Japan

Prior art keywords

substrate

recess

semiconductor substrate

fixing

holding plate

Prior art date

1988-02-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 7
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000003575 carbonaceous material Substances 0.000 claims 1
• 230000002265 prevention Effects 0.000 claims 1
• 239000002296 pyrolytic carbon Substances 0.000 claims 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
• 229910010271 silicon carbide Inorganic materials 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• 238000001947 vapour-phase growth Methods 0.000 claims 1