JPH01129273U - - Google Patents
Info
- Publication number
- JPH01129273U JPH01129273U JP2423188U JP2423188U JPH01129273U JP H01129273 U JPH01129273 U JP H01129273U JP 2423188 U JP2423188 U JP 2423188U JP 2423188 U JP2423188 U JP 2423188U JP H01129273 U JPH01129273 U JP H01129273U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- compound semiconductor
- ampoule
- single crystal
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003708 ampul Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 4
- 239000013078 crystal Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2423188U JPH01129273U (en:Method) | 1988-02-25 | 1988-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2423188U JPH01129273U (en:Method) | 1988-02-25 | 1988-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129273U true JPH01129273U (en:Method) | 1989-09-04 |
Family
ID=31243907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2423188U Pending JPH01129273U (en:Method) | 1988-02-25 | 1988-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129273U (en:Method) |
-
1988
- 1988-02-25 JP JP2423188U patent/JPH01129273U/ja active Pending