JPH01128138U - - Google Patents
Info
- Publication number
- JPH01128138U JPH01128138U JP2407188U JP2407188U JPH01128138U JP H01128138 U JPH01128138 U JP H01128138U JP 2407188 U JP2407188 U JP 2407188U JP 2407188 U JP2407188 U JP 2407188U JP H01128138 U JPH01128138 U JP H01128138U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- detector
- utility
- multilayer film
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 239000007888 film coating Substances 0.000 claims 1
- 238000009501 film coating Methods 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Spectrometry And Color Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2407188U JPH01128138U (hu) | 1988-02-25 | 1988-02-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2407188U JPH01128138U (hu) | 1988-02-25 | 1988-02-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01128138U true JPH01128138U (hu) | 1989-09-01 |
Family
ID=31243604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2407188U Pending JPH01128138U (hu) | 1988-02-25 | 1988-02-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01128138U (hu) |
-
1988
- 1988-02-25 JP JP2407188U patent/JPH01128138U/ja active Pending