JPH01128138U - - Google Patents

Info

Publication number
JPH01128138U
JPH01128138U JP2407188U JP2407188U JPH01128138U JP H01128138 U JPH01128138 U JP H01128138U JP 2407188 U JP2407188 U JP 2407188U JP 2407188 U JP2407188 U JP 2407188U JP H01128138 U JPH01128138 U JP H01128138U
Authority
JP
Japan
Prior art keywords
substrate
detector
utility
multilayer film
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2407188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2407188U priority Critical patent/JPH01128138U/ja
Publication of JPH01128138U publication Critical patent/JPH01128138U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Spectrometry And Color Measurement (AREA)
JP2407188U 1988-02-25 1988-02-25 Pending JPH01128138U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2407188U JPH01128138U (fr) 1988-02-25 1988-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2407188U JPH01128138U (fr) 1988-02-25 1988-02-25

Publications (1)

Publication Number Publication Date
JPH01128138U true JPH01128138U (fr) 1989-09-01

Family

ID=31243604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2407188U Pending JPH01128138U (fr) 1988-02-25 1988-02-25

Country Status (1)

Country Link
JP (1) JPH01128138U (fr)

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